Model

SMS-20-0

SMS-20-20

dimensions [mm]

75 x 75 x 20

Number of Blades

2

4

Open-Loop

Velocity [mm/s]

>20

Resolution [nm]

< 1

Closed-Loop

Closed-Loop Resolution MCS2 [nm]

1 (S) 4 (L)

Closed-Loop Repeatability, Full Stroke MCS2 [nm]

±30 (S) ,±60 (L)

Closed-Loop Resolution (H)CU [nm]

50 (L)

Closed-Loop Repeatability, Full Stroke (H)CU [nm]

± 1000 (L)

Options

Material Options

Steel base (-ST); Titanium base (-TI); Black anodized (-BK)

Vacuum Options

HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)

Non-Magnetic Option

Yes (-NM)