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Environment Specifics Stages

Environment Specifics Stages | Ultra High Vacuum Piezo Stages

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  • 작성자 :최고관리자
  • 작성일 :작성일19.09.16
  • 조회수 :1,948

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SmarAct의 Stage는 주변 조건에서 애플리케이션 뿐만 아니라 고진공(HV, 1E-6 mbar) 및 초 고진공(UHV, 1E-11 mbar)과 같은 보다 극단적인 환경에서도 사용 가능합니다.


 

Atmospheric Conditions

High Vacuum (HV)

Ultra-High Vacuum (UHV)

Ultra-High Vacuum (UHVT)

Pressure

--

Down to 1E-6 mbar

Down to 1E-11 mbar

Down to 1E-11 mbar

Wiring

Teflon-insulated stranded wires with braided shield and Teflon coating

Teflon-insulated stranded wires with braided shield

Kapton-insulated stranded wires

Teflon-insulated stranded wires with braided shield

Grease

Standard grease

HV compatible grease

Grease-free

Grease-free

Sensor Options

S, L, I

S, L

S

S

Bake-Out Temperature

--

Up to 130°C upon request

Recommended 130°C (max. 150°C)

Recommended 130°C (max. 150°C)

Vacuum Feedthrough

--

LEMO feedthroughs
- O-ring tightened by a screw nut
- Flanges available upon request

LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange
- DN40CF or DN63CF flange, other sizes upon request

LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange
- DN40CF or DN63CF flange, other sizes upon request

 
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